Time-Domain Finite Element Modeling of 3D Integrated Optical Devices

Introduction As integrated optical devices become more sophisticated, so does the experimentation and analysis required to design them. By augmenting conventional experiments with rigorous computer modeling we can lower costs, shorten schedules, and provide faster, more accurate predictions. Discrete modeling codes using finite differences or finite elements are the most general, albeit expensive. Nonetheless, they are competitive today by virtue of simple, robust algorithms and modern workstations that put near-supercomputer capabilities on the desktop. In support of computer modeling this paper demonstrates the practicality of time-domain finite element codes for simulating 2D and 3D devices on UNIX work-stations. We describe EMFlex, a finite element wave solver for large-scale electro-magnetic simulations, and apply it to highly confining dielectric waveguides in 3D routing and 2D grating couplers. EMFlex was originally developed for optical lithography and metrology studies1,2, funded in part by the NSF and SEMATECH.